Table 1
| Parameter | SEM-EDS | EDXRF | ICP-OES | ICP-MS |
| Analytical sample destruction | none to minimal | none to minimal | complete | complete partial (laser) |
| Detection limit (µg/g in glass) |
thousands | tens | tenths | hundredths |
| Multielement capability | 5 to 10 | 8 to 12 | 10 to 15 | 20 to 60 |
| Sample prep complexity | moderate | little to none | difficult | difficult little to none (laser) |
| Sample prep time | hours | minutes | days | days minutes (laser) |
| Typical sample size | >20 µg | >1 mg | >500 µg | >50 µg |
| Analysis time | 20 minutes | 5 minutes | 10 minutes | 10 minutes |
| Interelement and interference effects | moderate | moderate | moderate | low |
| Linear dynamic range (orders of magnitude) |
2-3 | 5 | 5-6 | 6-7 >7 (laser) |
| Precision | fair | fair | excellent | very good good (laser) |
| Accuracy | fair | fair | excellent | very good good (laser) |
| Operator skill level | moderate | low | moderate | high |
| Availablity of instrument automation | some | many | yes | yes |
| Instrument cost | high | moderate | moderate | high |
